The UNSW facilities of ANFF NSW provide micro- and nanofabrication tools, including lithography, etching and PDMS packaging. UNSW's Microfluidics Laboratory explicitly identifies these cleanrooms as the fabrication route for its microdevices.
Microdevice fabricationElectron-beam and optical lithographyThin-film deposition
The University of Queensland facilities within ANFF Queensland offer microfluidic prototyping and experimental infrastructure. The published equipment locations place the microfluidics platform at AIBN in St Lucia and the soft lithography suite at Long Pocket.
Microfluidic prototypingSoft lithography and PDMS processingPhotolithography
The South Australian node of ANFF provides supported access to micro- and nanofabrication infrastructure, with microfluidics among its specialisms. Its node listing identifies facilities at Adelaide University in Mawson Lakes and Flinders University in Bedford Park.
MCN is an ANFF facility supporting device design, prototyping and fabrication, including micro- and nanofluidic devices. Its Clayton site combines cleanrooms, microscopy, biochemistry and PC2 laboratories for academic and industry users.
Micro- and nanofluidic device fabricationDevice design and rapid prototypingCleanroom fabrication
RMIT's Micro Nano Research Facility supports device design, modelling, fabrication, packaging and characterisation. Its public booking catalogue documents a PDMS laboratory, soft-lithography expertise and photolithography tools relevant to microfluidic device work.
Micro- and nanodevice fabricationSoft lithographyPDMS processing
The University of Sydney's core fabrication facility supports research and industry prototyping, including microfluidic devices. It combines cleanroom fabrication with a dedicated area for PDMS processing and packaging.
Microfluidic prototypingLithographyEtching
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