The UNSW facilities of ANFF NSW provide micro- and nanofabrication tools, including lithography, etching and PDMS packaging. UNSW's Microfluidics Laboratory explicitly identifies these cleanrooms as the fabrication route for its microdevices.
Documented capabilities
- Microdevice fabrication
- Electron-beam and optical lithography
- Thin-film deposition
- Dry and plasma etching
- PDMS packaging
- Wafer dicing and wire bonding
Sources & evidence
- Facilities ANFF NSW · Checked 14 Sep 2026
UNSW-specific laboratories and processes; PDMS packaging
- Microfluids UNSW Sydney · Checked 14 Sep 2026
Microdevices for the Microfluidics Laboratory are made at the UNSW ANFF cleanrooms
- Contact Us ANFF NSW · Checked 14 Sep 2026
UNSW site office address